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Manufacturer: Kla-tencor 2131 Defect In Part number: KLA-Tencor 2131 Defect In-48270-ID Description: Capable Of Inspecting At The Following Rates: Speed: 5 Sec/cm2 Sensitivity: 0.62 Speed: 15 Sec/cm2 Sensitivity: 0.30 Speed: 30 Sec/cm2 Sensitivit . Product Category: Semiconductor, Sub Category: Metrology And Inspection

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