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Manufacturer: Gasonics Pep 3510a/a Dual Part number: GaSonics PEP 3510A/A Dual-48255-ID Description: Throughput: 120 Wph Streaming (1.2痠 Blanket Soft-baked Resist Ashed To Endpoint) Ash Rate: > 3.5痠/min. Uniformity: Within Wafer: . Product Category: Semiconductor, Sub Category: Etchers/ashers

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Manufacturer: Gasonics Pep 3510a/a Dual Part number: GaSonics PEP 3510A/A Dual-48255-ID Description: Throughput: 120 Wph Streaming (1.2痠 Blanket Soft-baked Resist Ashed To Endpoint) Ash Rate: > 3.5痠/min. Uniformity: Within Wafer: . Product Category: Semiconductor, Sub Category: Etchers/ashers